1 results
Nitrogen Effects on Crystallization Kinetics of Amorphous TiOxNy Thin Films
-
- Journal:
- Journal of Materials Research / Volume 17 / Issue 3 / March 2002
- Published online by Cambridge University Press:
- 31 January 2011, pp. 550-555
- Print publication:
- March 2002
-
- Article
- Export citation