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Simulation Studies of TiN PVD and CVD Thin Films for Contact/Via Liners
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- Journal:
- MRS Online Proceedings Library Archive / Volume 389 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 173
- Print publication:
- 1995
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- Article
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In-Situ Temperature Monitoring in Rtp by Acoustical Techniques
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- Journal:
- MRS Online Proceedings Library Archive / Volume 303 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 133
- Print publication:
- 1993
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- Article
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