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Polyurethane Pad Degradation and Wear Due to Tungsten and Oxide CMP
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- Journal:
- MRS Online Proceedings Library Archive / Volume 671 / 2001
- Published online by Cambridge University Press:
- 18 March 2011, M1.7
- Print publication:
- 2001
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- Article
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Atomic force microscopy, lateral force microscopy, and transmission electron microscopy investigations and adhesion force measurements for elucidation of tungsten removal mechanisms
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- Journal:
- Journal of Materials Research / Volume 14 / Issue 9 / September 1999
- Published online by Cambridge University Press:
- 31 January 2011, pp. 3695-3706
- Print publication:
- September 1999
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- Article
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