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Effects of Properties and Growth Parameters of Doped and Undoped Silicon Oxide Films on Wear Behavior During Chemical Mechanical Planarization Process
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- Journal:
- Journal of Materials Research / Volume 19 / Issue 4 / April 2004
- Published online by Cambridge University Press:
- 03 March 2011, pp. 996-1010
- Print publication:
- April 2004
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- Article
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