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- Book:
- Governing Failure
- Published online:
- 05 January 2014
- Print publication:
- 09 January 2014, pp 263-265
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Investigation of the Dopant Distribution in thin Epitaxial Silicon Layers by Means of Spreading Resistance Probe and Secondary Ion Mass Spectrometry
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- Journal:
- MRS Online Proceedings Library Archive / Volume 500 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 75
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- 1997
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