3 results
An Anomalous Vacancy Diffusion in Silicon during the Antimony Drive-in Diffusion
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- Journal:
- MRS Online Proceedings Library Archive / Volume 163 / 1989
- Published online by Cambridge University Press:
- 25 February 2011, 597
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- 1989
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Effect of pre- and postepitaxial deposition annealing on oxygen precipitation in silicon
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- Journal:
- Journal of Materials Research / Volume 1 / Issue 5 / October 1986
- Published online by Cambridge University Press:
- 31 January 2011, pp. 698-704
- Print publication:
- October 1986
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Effect of Preanneal Heat Treatment on Oxygen Precipitation in Epitaxial Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 71 / 1986
- Published online by Cambridge University Press:
- 28 February 2011, 139
- Print publication:
- 1986
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