2 results
Nanometer positioning accuracy over a long term traveling stage based on heterodyne interferometry
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- Journal:
- International Journal of Metrology and Quality Engineering / Volume 3 / Issue 2 / 2012
- Published online by Cambridge University Press:
- 14 November 2012, pp. 97-100
- Print publication:
- 2012
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- Article
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Dual-wavelength laser heterodyne interferometer for absolute displacement measurement
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- Journal:
- The European Physical Journal - Applied Physics / Volume 34 / Issue 1 / April 2006
- Published online by Cambridge University Press:
- 23 March 2006, pp. 67-70
- Print publication:
- April 2006
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- Article
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