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A Study on the Self-Stopping CMP Process for the Planarization of the High Step Height(@step height>1.5um) Pattern
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- Journal:
- MRS Online Proceedings Library Archive / Volume 816 / 2004
- Published online by Cambridge University Press:
- 15 March 2011, K4.2
- Print publication:
- 2004
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Growth of Semi-insulating GaN Layer by Controlling Size of Nucleation Sites for SAW Device Applications
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- Journal:
- Materials Research Society Internet Journal of Nitride Semiconductor Research / Volume 8 / 2003
- Published online by Cambridge University Press:
- 13 June 2014, e5
- Print publication:
- 2003
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- Article
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Korean
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- Journal:
- Journal of the International Phonetic Association / Volume 23 / Issue 1 / June 1993
- Published online by Cambridge University Press:
- 06 February 2009, pp. 28-31
- Print publication:
- June 1993
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