2 results
Fabrication of SiN-assisted 0.12um AlGaAs/InGaAs PHEMT and 60GHz-band MMICs for 60GHz WPAN system
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- Journal:
- MRS Online Proceedings Library Archive / Volume 969 / 2006
- Published online by Cambridge University Press:
- 26 February 2011, 0969-W03-10
- Print publication:
- 2006
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- Article
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The Effects of Plasma Induced Damage on The Channel Layers of Ion Implanted GaAs MESFETs during Reactive Ion Etching(RIE) and Plasma Ashing Processes
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- Journal:
- MRS Online Proceedings Library Archive / Volume 720 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, H3.4
- Print publication:
- 2002
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- Article
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