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Plasma Enhanced Metalorganic Chemical Vapor Deposition of Conductive Oxide Electrodes for Ferroelectric BaTiO3 Capacitors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 310 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 249
- Print publication:
- 1993
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- Article
- Export citation