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Low Temperature Plasma Synthesis of Nanocrystals and their Application to the Growth of Crystalline Silicon and Germanium Thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1426 / 2012
- Published online by Cambridge University Press:
- 07 June 2012, pp. 319-329
- Print publication:
- 2012
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- Article
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Control of Nanocrystalline Silicon Growth Phase and Deposition Rate through Voltage Waveform Tailoring during PECVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1339 / 2011
- Published online by Cambridge University Press:
- 30 June 2011, mrss11-1339-s04-05
- Print publication:
- 2011
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- Article
- Export citation