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Evaluating and predicting lifetime in capacitive MEMS switches
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- Journal:
- International Journal of Microwave and Wireless Technologies / Volume 3 / Issue 5 / October 2011
- Published online by Cambridge University Press:
- 21 September 2011, pp. 565-570
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Effects of Sputtering Metal Deposition Parameters in the Photoresist used as a Sacrificial Layer in Micro-electromechanical System Devices
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1075 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1075-J07-01
- Print publication:
- 2008
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- Article
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