3 results
Quantitative In-Situ Measurement of Asperity Compression Under the Wafer During Polishing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 867 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, W5.4
- Print publication:
- 2005
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- Article
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Instantaneous Fluid Film Imaging in Chemical Mechanical Planarization
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- Journal:
- MRS Online Proceedings Library Archive / Volume 867 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, W2.3
- Print publication:
- 2005
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- Article
- Export citation
In-Situ Friction and Pad Topography Measurements During CMP
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- Journal:
- MRS Online Proceedings Library Archive / Volume 816 / 2004
- Published online by Cambridge University Press:
- 15 March 2011, K5.4
- Print publication:
- 2004
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