3 results
Integrated Vapor Phase Cleaning and Pure no Nitridation for Gate Stack Formation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 470 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 229
- Print publication:
- 1997
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Study of Nitrogen Incorporation in Gate Oxides Using the Resistance to Oxidation Method
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- Journal:
- MRS Online Proceedings Library Archive / Volume 429 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 251
- Print publication:
- 1996
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Controlled Thin Oxidation and Nitridation in a Single Wafer Cluster Tool
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- Journal:
- MRS Online Proceedings Library Archive / Volume 387 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 253
- Print publication:
- 1995
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