3 results
Low Temperature CVD of TiN from Ti(NR2)4 and NH3: FTIR Studies of the Gas-Phase Chemical Reactions
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- Journal:
- MRS Online Proceedings Library Archive / Volume 335 / 1993
- Published online by Cambridge University Press:
- 15 February 2011, 159
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- 1993
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Flow Tube Kinetics of Gas-Phase Cvd Reactions
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- Journal:
- MRS Online Proceedings Library Archive / Volume 334 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 379
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- 1993
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IR Diagnostics of MOCVD Reaction Chemistry
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- Journal:
- MRS Online Proceedings Library Archive / Volume 282 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 605
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- 1992
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