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ARXPS studies of SiO2-SiC interfaces and oxidation of 6H SiC single crystal Si-(001) and C-(001) surfaces
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- Journal:
- Journal of Materials Research / Volume 9 / Issue 12 / December 1994
- Published online by Cambridge University Press:
- 03 March 2011, pp. 3088-3094
- Print publication:
- December 1994
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- Article
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