2 results
Influence of Oxygen on Rapid Thermal Co-Diffusion of Phosphorus and Aluminium in Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 387 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 413
- Print publication:
- 1995
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- Article
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Shallow-Junction Formation by Rapid Thermal Diffusion into Silicon from Doped Spin-on Glass Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 342 / 1994
- Published online by Cambridge University Press:
- 22 February 2011, 345
- Print publication:
- 1994
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- Article
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