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Gas Phase Chemistry Study During Deposition of a-Si:H and μc-Si:H Films by HWCVD using Quadrupole Mass Spectrometry
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- Journal:
- MRS Online Proceedings Library Archive / Volume 715 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, A23.5
- Print publication:
- 2002
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- Article
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Anomalous low-temperature Raman scattering in a–Si1−xHx
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- Journal:
- Journal of Materials Research / Volume 10 / Issue 6 / June 1995
- Published online by Cambridge University Press:
- 03 March 2011, pp. 1362-1370
- Print publication:
- June 1995
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- Article
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