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Mev Ion Beam Synthesis of Well-Defined Buried 3C-Sic Layers in Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 396 / 1995
- Published online by Cambridge University Press:
- 21 February 2011, 877
- Print publication:
- 1995
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- Article
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keV- and MeV- Ion Beam Synthesis of Buried SiC Layers in Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 354 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 171
- Print publication:
- 1994
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- Article
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