2 results
Activation of Sb in Ultra-Shallow Poly-Silicon Emitters Using Rapid Thermal Processing.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 224 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 317
- Print publication:
- 1991
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Investigations of an Antimony Doped Poly-Silicon Gate Structure for P-Type JFET Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 182 / 1990
- Published online by Cambridge University Press:
- 21 February 2011, 299
- Print publication:
- 1990
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- Article
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