The interest in virtual substrates, consisting of standard Si substrates
overgrown with SiGe strain-relaxed buffers (SRBs), is mainly driven by
applications in MOSFETs. They require thin SiGe layers with a high
Ge content, a high degree of relaxation, smooth surfaces, and a low threading
dislocation density. To fabricate such SRBs, we have developed a two-step MBE
method. The first step is carried out at low temperature (LT) and introduces
a supersaturation of point defects. In the second step, growth continues at a
conventional MBE temperature. During this stage, the point defects introduced
in the first step enable a high degree of strain relaxation, a smoother
surface, and a lower defect density. The most critical process parameter is
the growth temperature during the first (LT) step. If the temperature is too
high, sufficient relaxation will not occur because the concentration of point
defects is insufficient. When the temperature is too low, the concentration of
point defect becomes too high and causes structural disorder. We have found a
process window in which a high degree of relaxation and good crystal quality
are achieved in sub-100 nm layers. To characterize the surface morphology
and defects in the layers, various methods of optical, atomic force, and
transmission electron microscopy have been employed.