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A Bistable Membrane Approach to Micromachined Displays
Published online by Cambridge University Press: 10 February 2011
Abstract
The fabrication of bistable membrane structures with potential application to projection displays has been demonstrated. The use of a thin film in heavy compression combined with a central pivot point enables the fabrication of devices with two mechanically stable orientations. The demonstration structure consisted of a silicon dioxide membrane, a thin silicon nitride fillet pivot and thin aluminum electrodes. Polysilicon was used as the sacrificial material.
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- Research Article
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- Copyright © Materials Research Society 1998
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