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A Novel Method for Higher Order Aberration Correction in Electron Microscopes

Published online by Cambridge University Press:  04 August 2017

Shahedul Hoque ,
Hiroyuki Ito ,
Akio Takaoka  and
Ryuji Nishi
Shahedul Hoque
Affiliation:
Hitachi High-Technologies Corp., Ibaraki, Japan. Osaka University, Osaka, Japan.
Hiroyuki Ito
Affiliation:
Hitachi High-Technologies Corp., Ibaraki, Japan.
Akio Takaoka
Affiliation:
Osaka University, Osaka, Japan.
Ryuji Nishi
Affiliation:
Osaka University, Osaka, Japan.

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 472 - 473
Copyright
© Microscopy Society of America 2017 

References

[1] Nishi, R., Ito, H. & Hoque, S. 18th International Microscopy Congress (IMC2014), Prague, Czech Republic 2014). p. 200–201.Google Scholar
[2] Hoque, S., Ito, H., Nishi, R., Takaoka, A. & Munro, E. Ultramicroscopy 161 2016). p. 74–82.CrossRefGoogle Scholar
[3] Munro's Electron Beam Software Ltd., http://www.mebs.co.uk/.Google Scholar