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FEGSEM X-Ray Mapping System with Multiple SDDs for Quantitative X-Ray Mapping and Imaging

Published online by Cambridge University Press:  30 July 2020

Richard Wuhrer  and
Ken Moran
Richard Wuhrer
Affiliation:
Western Sydney University, Penrith, New South Wales, Australia
Ken Moran
Affiliation:
Moran Scientific Pty Ltd, Bungonia, New South Wales, Australia

Abstract

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Type
X-ray, Electron and Synchrotron-Based X-ray Imaging and Analysis
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 64 - 66
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Copyright
Copyright © Microscopy Society of America 2020

References

Wuhrer, R. and Moran, K., “FEGSEM Dedicated X-Ray Mapping System with Multiple Silicon Drift Detectors for Quantitative X-Ray Mapping”, AMAS2019, 15th Biennial Australian Microbeam Analysis Symposium, 11–15 February Melbourne Victoria, Australia, 2019.Google Scholar
Wuhrer, R. and Moran, K., “Dedicated X-Ray Mapping System with Single and Multiple SDD Detectors for Quantitative X-Ray Mapping and Data Processing”, Microsc. Microanal. 21 (Suppl 3), 2191–2192 (2015).10.1017/S1431927615011733CrossRefGoogle Scholar
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Wuhrer, R. and Moran, K., “X-ray Mapping Characterisation of Materials that have a Large Dynamic”, Microsc. Microanal. 22 (Suppl 3), 114–115 (2016).10.1017/S1431927616001422CrossRefGoogle Scholar
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Authors wish to thank Amptek Inc for the detectors, especially John Pantazis and David Clifford. Also a special thank you to Scott Cheevers for machining specialised flanges for the SEM and Western Sydney University Advanced Materials Characterisation Facility (AMCF) and staff.Google Scholar