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Correlated Post-mortem Raman and TEM Investigation of Nanoindentation Induced Structural Changes in Silicon as a Function of Temperature

Published online by Cambridge University Press:  30 July 2020

Praveena Manimunda
Affiliation:
Bruker Nano Surfaces, Eden Prairie, Minnesota, United States
Eric Hintsala
Affiliation:
Bruker Nano Surfaces, Eden Prairie, Minnesota, United States
Douglas Stauffer
Affiliation:
Bruker Nano Surfaces, Eden Prairie, Minnesota, United States
S.A.S. Asif
Affiliation:
Industron, Thiruvananthapuram, Kerala, India

Abstract

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Type
Surface and Subsurface Microscopy and Microanalysis of Physical and Biological Specimens
Copyright
Copyright © Microscopy Society of America 2020

References

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