In this paper, the effect of anodization time on the properties of TiO2 nanotube humidity sensors is reported. TiO2 nanotube arrays were grown by anodization of Ti foil using diethylene glycol and ammonium fluoride. Highly ordered TiO2 nanotube arrays were obtained, with the length of tube increasing from 4 to 20 μm as the time of anodization increases, at the expense of nanotube integrity. Humidity sensors based on TiO2 nanotube arrays were fabricated in impedance mode with ITO as top contact. The results revealed that sensor performance does not correlate with anodization time, regardless of enhanced area, showing an optimum morphology at 4h and 10h. The increase resistivity of the sensors upon water exposure, a donor molecule, is explained by the lack of TiO2 stoichiometry and the fluctuations in the concentration of oxygen vacancies.
