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COMPENSATION OF THE INTERNAL STRESS GRADIENT IN ULTRANANOCRYSTALLINE DIAMOND FOR THE FABRICATION OF MICROACTUATORS AND TRIBOMETERS ON A CHIP
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1478 / 2012
- Published online by Cambridge University Press:
- 21 February 2013, imrc12-1478-s7d-109
- Print publication:
- 2012
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- Article
- Export citation