A computer control deformation set-up has been specifically developed for measuring the elastic and plastic properties of thin films. It combines a piezo-actuated microtensile-testing device, based on an original tripod design, with an optical image acquiring and analysis system for measuring specimen strains. The paper will be partly devoted to describe the experimental deformation set up and its performance through mechanical tests of polyimide and aluminum samples. The Young's moduli, which are deduced from the stress-strain curves, are in good agreement with reported bulk average values. The results confirmed the ability of the equipment for the measurements of very small load and displacement levels, which are a prerequisite for such type of investigations.
