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grazing incidence x-ray diffraction (gixd)

Advances in X-ray Analysis (1)

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Stress-Depth Profiles in Magnetron Sputtered Mo Films Using Grazing Incidence X-Ray Diffraction (GIXD)
B. L. Ballard, P. K. Predecki, D. N. Braski
Journal:

Advances in X-ray Analysis / Volume 37 / 1993

Published online by Cambridge University Press:

06 March 2019, pp. 189-196

Print publication:

1993
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Intrinsic stresses as a function of σ, the 1/e penetration depth were measured for a smooth, 1μm thick, fine grained, cylindrical post magnetron sputtered molybdenum film deposited on a vycor glass substrate in the dynamic deposition mode. Using grazing incidence diffraction and the Mo (321) reflection, lattice spacing profiles were determined for τ values from 200-4400 Å. The in-plane intrinsic stresses parallel and perpendicular to the post axis were determined employing the ϕ-integral method and assuming elastic isotropy. The results were related to the surface structure and composition profiles via atomic force microscopy (AFM) and auger electron spectroscopy (AES) respectively.