A new TEM sample preparation technique using electron-beam-induced
deposition combined with low-energy ion milling was used to fabricate for
two different shapes of sample, conical and plate. High-quality HREM
images can be obtained from samples prepared by this technique. A desired
sample position can be obtained with high accuracy, and the total sample
preparation time can be much less than conventional techniques. Because
the gas deposition system used can easily be integrated in a conventional
SEM, the method can be performed in any laboratory equipped with a SEM and
an ion milling machine.
