This paper reports the formation of low-energy low-divergence pulsed
indium atomic beam via ablation of thin film by illumination from the rear
side with second harmonic of Q-switched Nd:YAG laser under high vacuum
(∼10−5 Torr). Angular divergence of ablated indium
atomic, reflectivity modulation of thin film due to ablation, and
longitudinal atomic velocity of ablated beam were studied as a function of
laser fluence. Atomic force microscope scans of the deposited multiple
shots of pulsed atomic beams show the formation of
“nano-hills.”
