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microstructured sn targets

Laser and Particle Beams (1)

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Enhancement of extreme ultraviolet emission from laser irradiated targets by surface nanostructures
E. F. Barte, R. Lokasani, J. Proska, L. Maresova, D. Kos, O. Maguire, G. Joseph, J. Sheil, F. O'Reilly, T. McCormack, E. Sokell, G. O'Sullivan, J. Limpouch, P. Dunne
Journal:

Laser and Particle Beams / Volume 35 / Issue 4 / December 2017

Published online by Cambridge University Press:

11 September 2017, pp. 574-578
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The effects of shape and thickness of a tin surface layer and of the energy of a 170 ps neodymium:yttrium-aluminum-garnet laser pulse on the conversion efficiency (CE) into extreme ultraviolet emission in the 13.5 nm region is investigated. Whereas a CE of up to 1.16% into the 2% reflection band of multilayer Mo/Si optics was measured for a bulk Sn target at a laser energy of 25 mJ, significant CE enhancement up to 1.49% is demonstrated for a 200-nm-thick Sn layer on a microstructured porous alumina substrate.