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Realization of silicon nanopillar arrays with controllable sidewall profiles by holography lithography and a novel single-step deep reactive ion etching
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1258 / 2010
- Published online by Cambridge University Press:
- 01 February 2011, 1258-Q14-02
- Print publication:
- 2010
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- Article
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