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The Effects of Nitrogen on Electrical and Structural Properties in TaSixNy/SiO2/p-Si MOS Capacitors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 716 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, B8.6
- Print publication:
- 2002
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- Article
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Promising Gate Stacks with Ru & RuO2 Gate Electrodes and Y-silicate Dielectrics
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- Journal:
- MRS Online Proceedings Library Archive / Volume 670 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, K3.1
- Print publication:
- 2001
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- Article
- Export citation