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Fidelity of Holographic Lithography for Fabrication of 3D SU-8 Photonic Structures and How to Minimize Distortion by Optical Design
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1182 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1182-EE13-07
- Print publication:
- 2009
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- Article
- Export citation