2 results
Improved Characterization of high-k Degradation with Vacuum C-AFM
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1074 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1074-I11-02
- Print publication:
- 2008
-
- Article
- Export citation
Scanning Spreading Resistance Microscopy For 3D-Carrier Profiling in FinFET-based Structures
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1070 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1070-E01-11
- Print publication:
- 2008
-
- Article
- Export citation