1 results
Properties of furnace-annealed, high-resistivity, arsenic-implanted polycrystalline silicon films
-
- Journal:
- Journal of Materials Research / Volume 1 / Issue 2 / April 1986
- Published online by Cambridge University Press:
- 31 January 2011, pp. 311-321
- Print publication:
- April 1986
-
- Article
- Export citation