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Composition and Structure of SiCx:H Films Formed by Plasma Immersion ION Implantation From A Methane Plasma
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- Journal:
- MRS Online Proceedings Library Archive / Volume 609 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, A23.1
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- 2000
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Formation of silicon carbide and amorphous carbon films by pulse biasing silicon to a high voltage in a methane electron cyclotron resonance microwave plasma
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- Journal:
- Journal of Materials Research / Volume 13 / Issue 7 / July 1998
- Published online by Cambridge University Press:
- 31 January 2011, pp. 1765-1768
- Print publication:
- July 1998
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An Apparatus for Magnetron Sputter Coating and Plasma Immersion Ion Implantation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 396 / 1995
- Published online by Cambridge University Press:
- 21 February 2011, 521
- Print publication:
- 1995
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