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High Temperature Plasma Etching of PZT Capacitor Stacks for High Density FERAMs
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- Journal:
- MRS Online Proceedings Library Archive / Volume 748 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, U1.7
- Print publication:
- 2002
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- Article
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Metal Complexes in Oxidic Matrices
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- Journal:
- MRS Online Proceedings Library Archive / Volume 271 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 621
- Print publication:
- 1992
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- Article
- Export citation