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Effect of Tribological Properties of Undoped and Florine-Doped Silicon Di-Oxide Fims on Chemical Mechanical Planarization Process
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- Journal:
- MRS Online Proceedings Library Archive / Volume 697 / January 2001
- Published online by Cambridge University Press:
- 17 March 2011, P9.3
- Print publication:
- January 2001
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- Article
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