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Improvement of Surface Crystalline Quality of an Epitaxial (100)ZrN Film as a Bottom Electrode Diffusion Barrier for Ferroelectric Capacitors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 688 / 2001
- Published online by Cambridge University Press:
- 17 March 2011, C4.24.1
- Print publication:
- 2001
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- Article
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