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Donor passivation in pseudomorphic-high electron mobility transistors due to plasma-incorporated fluorine impurities observed using x-ray photoemission spectroscopy
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- Journal:
- Journal of Materials Research / Volume 21 / Issue 5 / May 2006
- Published online by Cambridge University Press:
- 01 May 2006, pp. 1331-1335
- Print publication:
- May 2006
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- Article
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