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Time-Dependent Reliability Of The Interface Between A-C:F And Inorganic Dielectrics
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- Journal:
- MRS Online Proceedings Library Archive / Volume 511 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 365
- Print publication:
- 1998
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- Article
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Fluorinated Amorphous Carbon Thin Films Grown from C4F8 for Multilevel Interconnections of Integrated Circuits
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- Journal:
- MRS Online Proceedings Library Archive / Volume 443 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 165
- Print publication:
- 1996
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- Article
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