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High Purity Titanium Silicide Films Formed by Sputter Deposition and Rapid Thermal Annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 92 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 191
- Print publication:
- 1987
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- Article
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Formation of Silicides by Rapid Thermal Annealing Over Polycrystalline Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 54 / 1985
- Published online by Cambridge University Press:
- 26 February 2011, 753
- Print publication:
- 1985
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- Article
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