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A Green Approach to Reversibly Tuning the Optical Properties of Metal Oxides
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1443 / 2012
- Published online by Cambridge University Press:
- 12 June 2012, mrss12-1443-r06-01
- Print publication:
- 2012
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The Impact of Dielectric Films and Post-Metal Etch Wet Treatment on Charge-Induced Corrosion of Tungsten Vias
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- Journal:
- MRS Online Proceedings Library Archive / Volume 990 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0990-B03-17
- Print publication:
- 2007
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- Article
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In SITU Spectroscopic Diagnostics of the Influence of Chamber Wall Polymer on Oxide Etch Rate
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- Journal:
- MRS Online Proceedings Library Archive / Volume 544 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 197
- Print publication:
- 1998
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- Article
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