2 results
Templating Nanopores Into Poly(MethylSilsesquioxane): New Lowdielectric Coatings Suitable for MicroElectronic Applications
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 511 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 69
- Print publication:
- 1998
-
- Article
- Export citation
Experimental and Theoretical Study of Structure-Dielectric Property Relationships for Polysilsesquioxanes
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 511 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 39
- Print publication:
- 1998
-
- Article
- Export citation