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Effect of Plasma Treatment and TMCTS Vapor Annealing on the Reinforcement of Porous low-k Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 863 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, B3.10
- Print publication:
- 2005
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- Article
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A Novel Organosiloxane Vapor Annealing Process for Improving Elastic Modulus of Porous Low-k Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 812 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, F6.2
- Print publication:
- 2004
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- Article
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