3 results
Effects of BEOL Stack on Thermal Mechanical Stress of Cu Lines
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- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F08-01
- Print publication:
- 2006
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- Article
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Thermal stress characteristics of two-level Al(Cu) interconnect structure
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- Journal:
- Journal of Materials Research / Volume 18 / Issue 4 / April 2003
- Published online by Cambridge University Press:
- 06 January 2012, pp. 848-854
- Print publication:
- April 2003
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- Article
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Morphological Transitions in Fluorinated and Non-Fluorinated Parylenes
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- Journal:
- MRS Online Proceedings Library Archive / Volume 565 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 297
- Print publication:
- 1999
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- Article
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