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Silicon and Nitrogen Dangling Bonds Point Defects in PECVD Silicon Oxynitrides Thin Layers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 284 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 339
- Print publication:
- 1992
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- Article
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A Thermodynamic Model for the Hydrogen Incorporation in PECVD Silicon Oxynitrides Thin Layers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 284 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 363
- Print publication:
- 1992
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- Article
- Export citation