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Atomic Layer Deposition and Vapor Deposited SAMS in a CrossBeam FIB-SEM Platform: A Path To Advanced Materials Synthesis
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- Journal:
- Microscopy Today / Volume 17 / Issue 2 / March 2009
- Published online by Cambridge University Press:
- 14 March 2018, pp. 18-25
- Print publication:
- March 2009
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- Article
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